PPB grade ultra-high purity PFA coating-CMP equipment grinding disc long-term corrosion protection

Application Parts:CMP equipment grinding disc and other contact with the core of the grinding liquid metal parts.

face problems: The grinding disc is exposed to nitric acid, hydrogen peroxide and other strong oxidizing grinding liquid for a long time, and the metal substrate is easy to be corroded, which leads to the precipitation of metal ions, contaminates the wafer and causes chip defects.

Solution: Ultra-high purity modified PFA coating was applied to a thickness of 600-1000 μm.

application effect:

• ultimate clean: Metal ion content is lower than PPB level, from the source to prevent pollution.

• Excellent corrosion protection: can withstand strong acid strong alkali chemical liquid long-term immersion, corrosion time> 5000 hours.

• Comprehensive performance is excellent: The coating is dense and impermeable, and the hardness is moderate (3H). It can be processed twice to ensure accuracy, and the cost is much lower than that of ceramic and other alternatives.