wafer flower basket (Cassette)-anti-scratch and acid corrosion resistance

Application Parts: Flower basket (usually ceramic or plastic) for wafer transfer and cleaning.

face problems: ceramic flower basket high hardness easy to scratch the wafer; plastic flower basket is not resistant to hydrofluoric acid (HF) cleaning fluid corrosion. Both are at risk.

Solution: The surface of the flower basket is coated with a special ultra-high purity PFA coating of 200-400 μm thick.

application effect:

• double protection: The hardness of 3H can not only effectively prevent the wafer from being scratched, but also resist the corrosion of strong acids such as HF and nitric acid.

• high purity safety:PPB grade purity ensures that the coating itself does not introduce contamination.

• economic benefit: Replace expensive ultra-high purity injection molding or special ceramic materials with coating solutions to reduce costs.