-
静电卡盘涂层
在半导体制造设备中，静电卡盘（Electrostatic Chuck, ESC）承担着晶圆吸附固定、热传导、静电均匀释放等多重功能。行业常以“高端”与“低端”ESC划分应用场景，但真正决定其性能上限的，并非外观结构或者基材配方，而是一个更“隐蔽”的因素——表面处理工艺。
为什么说表面处理是ESC的性能分水岭？넶15 2026-03-06 -
JuncWay®Series seal ring special coating-semiconductor equipment localization key
developed a series of special modified coatings for FFKM/FKM seals in different process equipment such as semiconductor etching, cleaning, CMP and other specific conditions (plasma, strong corrosion, high vacuum), successfully breaking the foreign monopoly and becoming the core coating supplier of high-end seals in China.
넶13 2026-01-26 -
wafer flower basket (Cassette)-anti-scratch and acid corrosion resistance
provides ultra-pure coating for 8/12-inch wafer flower baskets. While ensuring extremely high cleanliness, it gives them excellent wear resistance and hydrofluoric acid corrosion resistance, and protects high-value wafers from damage during transportation and cleaning.
넶12 2026-01-26 -
PPB grade ultra-high purity PFA coating-CMP equipment grinding disc long-term corrosion protection
is the core component of semiconductor chemical mechanical polishing (CMP) equipment-grinding disc, providing PPB grade (one billionth) ultra-high purity protective coating to solve its corrosion and metal ion pollution problems under strong acid, strong alkali and high temperature conditions.
넶13 2026-01-26
